Design of zoom homogenizer to control size of illumination field

Abstract

We proposed a zoom homogenizer that can control the size of the illumination field by adding one lens array to the conventional imaging-type beam homogenizer. An equivalent lens system was used to derive the imaging condition and size of the illumination field. The result of the ray-tracing simulation shows the validity of the zoom homogenizer to generate the uniform and sharp-edged beam. We presented the strengths and weaknesses of the zoom homogenizer in terms of its etendue with the maximum acceptance angle of the system.