Basics of EBSD Method and its Latest Progress

Abstract

3 nm X EBSD SEM Scanning Electron Microscope EBSD 4 FIB Focused Ion Beam-SEM EBSD 3 3 5 EBSD 6-7 EBSD EBSD EBSD SEM EBSD EBSD Fig. 1 Arrangement of EBSD detector and specimen, and an example of EBSD pattern. Fig. 2 The theory of the EBSD pattern generation. A crystal plane is expanded into the space and its trace of hitting the phosphor screen will become a center line of the corresponded band.