Experimental study of the systematic errors for a Mueller matrix double rotating compensator ellipsometer

Abstract

The Mueller Matrix Ellipsometer based on the optical PC1SC 2A arrangement has been developped by Collins a few years ago. We present systematic errors due to a shift of the azimuth of the optical elements (i.e. polarizer, analyzer, the two compensators). This ellipsometer is more sensible to an error due to a compensator than an error due to the analyzer or the polarizer. The errors on some coefficients mij cannot be cancelled but for the other, a four-zone measurement method is proposed. A two zone method with A = P = ±45° is sufficient for an isotropic sample to eliminate the errors on ρ-pp. (Figure Presented). © 2008 Wiley-VCH Verlag GmbH & Co. KGaA.