Journal Article

Fast valve for gas injection into vacuum

Review of Scientific Instruments (1978) 49(6) 872-873
DOI: 10.1063/1.1135637
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Abstract

A simple, fast, reliable magnetically driven gas valve for use in plasma experiments is described. The pressure rise time has been measured to be ∼1 Torr/μs at the valve opening.

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APA

Fisher, A., Mako, F., & Shiloh, J. (1978). Fast valve for gas injection into vacuum. Review of Scientific Instruments, 49(6), 872–873. https://doi.org/10.1063/1.1135637

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