Implementation of CMOS-MEMS compound lens

Abstract

This study demonstrates the possibility of implementing lens system via CMOS process. The ever first CMOS based optical focusing system successfully demonstrated focusing capability, with 5um by 6um focus spot size at 614um, and capable of moving focal point 12um in axial direction. This system is composed of a lens set and an electrothermal actuated optical bench. One PDMS dispensed planar-convex lens and CMOS made Fresnel lens forms lens system to achieve focusing power as NA equals 0.38. This kind of system has potential to monolithically integrate with optical sensing circuitry with low cost. © 2007 IEEE.