Monte carlo simulation of electrons' and ions' trajectories in magnetron sputtering systems

Abstract

A 3D simulation system has been developed to study electron and ion densities and other plasma parameters in circular and rectangular magnetron sputtering systems. Typically, 105 particles of each species are tracked simultaneously for a time period when the plasma parameters' distributions get stabilised. During this period, the particles undergo Lorentz force and different kinds of collisions. The collisions are generated by Monte Carlo method using null-collision technique © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.