Characterization of microhollow cathode discharges

Abstract

This work is devoted to the study of the electrical characteristics of microhollow cathode discharges (MHCD) at moderate to high pressure in argon and air for different geometries. High-pressure glow discharges can be operated in MHCD devices with µm electrode spacing. Experiments have been performed to determine the so-called Paschen curves, i.e. the dependence of the breakdown voltage on the product electrode gap and gas pressure. Current-voltage characteristic curves were obtained as a function of the pressure and hole diameter. MHCD enables stable direct current discharges that could be ignited for pressures ranging from 12 to 800 Torr, in a very wide range of current densities and electrodes materials. Evidence of electron field emission was observed for several ranges of gap spacing. Keywords: