Birefringent reconfigurable metasurface at visible wavelengths by MEMS nanograting

Abstract

A birefringent reconfigurable metasurface at visible wavelengths was obtained by combining an Au nanograting metasurface, which shows very high birefringence characteristics in visible light, and a microelectromechanical system actuator. The system was based on the electrostatic out-of-plane motion of the nanograting and it was developed by microfabrication. The modulation of retardation was achieved at a wavelength of 633 nm by up to 25.3° (from 21.5° to 46.8°) by applying a voltage in the range of 0-200 V.