Formation and investigation of thin MoS2 films for electronics

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Abstract

The article is devoted to obtaining and studying of films of molybdenum disulfide for applications in electronics. The paper presents the results of processing images obtained using optical and atomic force microscopy of films deposited by magnetron sputtering. The structure of the substrate has shown significant influence on structure of film of MoS2.

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APA

Samartsev, A. S., & Zin Phyo, K. (2017). Formation and investigation of thin MoS2 films for electronics. In Journal of Physics: Conference Series (Vol. 857). Institute of Physics Publishing. https://doi.org/10.1088/1742-6596/857/1/012036

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