Comparison between DUV/VUV and Femtosecond Laser Processing of Dielectrics and Semiconductors.

Abstract

Both of DUV/VUV and femtosecond lasers are expected as novel tools for materials processing for the next generation. DUV/VUV laser is good at surface micropatterning and surface shaping, while femtosecond laser is suitable for internal modification of transparent materials as well as micro-hole drilling, cutting and high aspect ratio machining. In this paper, precison microfabrication of dielectrics and semiconductors using DUV/ VUV and femtosecond lasers are reviewed, and features of each laser processing are compared.