Abstract
We have developed a silicon (Si)-germanium (Ge)-silica monolithic photonic integration platform for telecommunications applications of highly integrated silicon-based photonic devices. On this platform, high-performance silica-based passive devices and compact, high-speed Si/Ge-based active devices are monolithically integrated. We have used this platform to develop a photonic receiver for wavelengthdivision multiplexing systems, in which a silica-based 16-channel arrayed waveguide grating wavelength filter and Ge photodiodes are monolithically integrated. This Si-Ge-silica photonic integration platform also enables direct integration of electronic circuits.
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Yamada, K., Tsuchizawa, T., Nishi, H., Kou, R., Hiraki, T., Takeda, K., … Yamamoto, T. (2014). Silicon-germanium-silica monolithic photonic integration platform for telecommunications device applications. NTT Technical Review, 12(5). https://doi.org/10.53829/ntr201405ra1
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