Study of excitation rates in a hollow cathode discharge

Abstract

In this work a dc discharge with a copper hollow cathode in argon used for deposition applications is investigated using atomic emission spectroscopy. Typical discharge parameters during our investigation are pressures between 80 and 200 Pa and current densities up to 7mAcm-2. The radial light intensity profiles of some selected copper and argon lines were measured. An analysis of these profiles gives insigths into the excitation rates of the argon filling gas and the sputtered metal atoms as well as into the radial dimension of the negative glow. The different excitation mechanisms lead to a sharp change of the radial light intensity profiles emitted by many copper spectral lines, which indicates the transition region between the cathode fall and the negative glow, The length of the cathode fall was observed to be very insensitive to all the macroscopic discharge parameters. A nearly constant value was found for the cathode fall length, which corresponds to about 22% of the cathode radius.