Hydrothermal growth of titania nanowires for SAW device sensing area

Abstract

Synthesis of titania or titanium dioxide (TiO2) is attracted to energy and environmental applications. Here, the growth of nanostructure TiO2 nanowires on Si (100) substrates by using the two-step method. Different seed layers of TiO2 were deposited by spin coating and annealing, followed by the growth of TiO2 nanowires by using the hydrothermal method. The sol-gel technique was used in preparing the TiO2 solution for the thin film deposition purpose. Acetic acid, hydrochloric acid and tris (2-aminoethyl) amine were used as a stabilizer to synthesize three different TiO2 seed layers. The aim of this study was to understand the role of polycrystalline size on thin film towards the diameter of nanowires grown as a sensing area in Surface Acoustic Wave (SAW) Biosensor. The morphology and structure of the thin film and TiO2 nanowires were characterized using X-Ray diffraction (XRD), scanning electron microscope (SEM), field emission scanning electron microscope (FESEM) and atomic force microscopy (AFM).