Equilibrium position of misfit dislocations in thin epitaxial films

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Abstract

The role of the free surface in determining the equilibrium position of misfit dislocations in thin epitaxial films is considered. When the film is elastically stiffer than the substrate, the core of the dislocation is predicted to lie at some distance from the interface in the softer substrate. On the other hand, when the film is softer than the substrate, the core of the dislocation is always predicted to lie close to the interface.

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APA

Wu, X., & Weatherly, G. C. (2003). Equilibrium position of misfit dislocations in thin epitaxial films. Semiconductor Science and Technology, 18(4), 307–311. https://doi.org/10.1088/0268-1242/18/4/320

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