Optical Tailoring of RF Magnetron Sputtered ZnO Thin Films

Abstract

Pure and N2 doped ZnO thin films of thickness ranging ∼300-500nm with 5,10,15,20,25, and 50 sccm inflow ratios of N2 are deposited on soda-lime glass by means of RF magnetron sputtering system, and observed the dependence of optical properties of ZnO by the function of doping with the help of spectroscopic ellipsometer. And found that the N2-inflow highly affects the optical properties of ZnO thin films. Even the high transmittance of about 97% is achieved and absorbance graph also shows that slight variation in N2 inflow affects the absorbance, which is maximum with in UV region. Optical conductivity of ZnO is also observed high with the increase of N2 inflow. With 25sccm N2 inflow conductivity rose to the maximum value of about 1.4 × 107 Ω -1cm-1, with 15sccm inflow of N2 conductivity value is 2.0 × 106 Ω -1cm-1 in the visible region. This is a strong contribution towards next generation photovoltaic devices.