Tungsten-surface-structure dependence of sputtering yield for a noble gas

Abstract

Using the binary-collision approximation simulation with atomic collision in any structured target code AC∀T, we calculated sputtering yield, range, and retention rate for tungsten with a rough surface under argon atom irradiation. The simulation revealed the sputtering yield decreases and the retention rate increases as the surface becomes rougher. Because these quantities strongly depend on the surface, we suggest that it is necessary to consider the surface structure of the tungsten target when estimating the effects of walls.