Control of High Power Pulsed Magnetron Discharge by Monitoring the Current Voltage Characteristics

Abstract

Discharge current voltage (IV) curves are directly measured at the target of a high impulse power magnetron sputtering (HiPIMS) plasma for the target materials aluminium, chromium, titanium and copper. These discharge IV curves have been correlated with ICCD camera images of the plasma torus. A clear connection between the change in the discharge IV curve slopes at specific currents and the appearance of localized ionization zones, so-called spokes, in a HiPIMS plasma is identified. These spokes appear above typical target current densities of 2 A/cm2. The slope of the discharge IV curves, at current densities when spokes are formed, depends on the mass of the target atoms with a higher plasma conductivity for higher mass target materials. This is explained by the momentum transfer from the sputter wind to the argon background gas, which leads to higher plasma densities for heavier target materials. The change in the VI curve slope can be used to identify the spokes regime for HiPIMS plasmas, as being mandatory for deposition of good quality materials by HiPIMS. Consequently, the discharge IV curve slope monitoring can be regarded an essential control approach of any industrial HiPIMS process, where discharge IV curves are much easier accessible compared to more complex diagnostics such as time and space resolved ICCD camera measurements. (© 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim).