Robust Mechanical Properties of Electrically Insulative Alumina Films by Supersonic Aerosol Deposition

Abstract

Electrically insulating alumina films were fabricated on steel substrates using supersonic aerosol deposition and their hardness and scratchability were measured. Alumina particles (0.4-μm diameter) were supersonically sprayed inside a low-pressure chamber using between 1 and 20 nozzle passes. These alumina particles were annealed between 300 and 800 K to determine the temperature’s effect on film crystal size (37-41 nm). Smoother surface morphology and increased electrical resistance of the thin films were observed as their thicknesses grew by increasing the number of passes. Resistances of up to 10,000 MΩ demonstrate robust electrical insulation. Significant hardness was measured (1232 hv or 13.33 GPa), but the alumina films could be peeled off with normal loads of 36 and 47 N for films deposited on stainless steel and SKD11 substrates, respectively. High insulation and hardness confirm that these alumina films would make excellent electrical insulators.