Heavy-Ion-Induced Charge Sharing Measurement with a Novel Uniform Vertical Inverter Chains (UniVIC) SEMT Test Structure

Abstract

In this paper, a novel uniform vertical inverter chains (UniVIC) single event multiple transient (SEMT) test structure is proposed for the first time. Charge sharing between standard inverters is measured for the first time experimentally. The heavy-ion experiment results in 65 nm bulk CMOS process indicate that charge sharing can impact three transistors at most. At the same time, the occurring probability of charge sharing is attained for the first time experimentally. 3D TCAD simulations have also verified them. In total, the conclusions are helpful for researchers to have a direct knowledge of charge sharing in concrete circuits, and then to improve the precise of soft error evaluation.