Numerical implementation of a cold-ion, Boltzmann-electron model for nonplanar plasma-surface interactions

Abstract

Plasma-surface interactions are ubiquitous in the field of plasma science and technology. Much of the physics of these interactions can be captured with a simple model comprising a cold ion fluid and electrons which satisfy the Boltzmann relation. However, this model permits analytical solutions in a very limited number of cases. This paper presents a versatile and robust numerical implementation of the model for arbitrary surface geometries in cartesian and axisymmetric cylindrical coordinates. Specific examples of surfaces with sinusoidal corrugations, trenches, and hemi-ellipsoidal protrusions verify this numerical implementation. The application of the code to problems involving plasma-liquid interactions, plasma etching, and electron emission from the surface is discussed.