Electrical characterization of MIM capacitor comprises an adamantane film at room temperature

Abstract

We fabricated a new metal-insulator-metal capacitor at room temperature, comprising a ∼90 nm thin low-k adamantane film on a Si substrate. The surface morphology of deposited organic film was investigated by using scanning electron microscopy and Raman spectroscopy, which is confirmed that the adamantane thin film was uniformly distributed on the Si surface. The adamantane film exhibits a low leakage current density of 7.4 x 10-7 A/cm2 at 13.5 V, better capacitance density of 2.14 fF/μm2 at 100 KHz.