Effects of fluorine dimer excimer laser radiation on the optical transmission and defect formation of various types of synthetic SiO2 glasses

Abstract

The changes in vacuum ultraviolet-ultraviolet optical transmission and the formation of point defects on synthetic wet (OH content; 120 ppm), dry (OH content <1 ppm), and fluorine doped (approximately 1 mol%) SiO2 glasses are investigated using various spectroscopic methods. Results showed that degradation of the optical transmission of F-doped silica is much less than F-free, wet, or dry silica glasses.