Finite Element Analysis of Circular Silicon Diaphragm

Abstract

Miniaturization of sensing devices not only reduces the size, but also enhances the performance and reliability in sector of automation, space, weather monitoring and forecasting. It has become important for scientist and researchers working in the field of micro-electro-mechanical system area to simulate the structure before actual fabrication. This paper reports about the performance of proper meshing required to lead the exact results of simulated circular silicon diaphragm with the help of finite element method. In this paper, we have shown that the proper meshing of the circular silicon diaphragm has shifted the vibrating frequency of the diaphragm under different pressures applied.