Characterization of a low pressure supersonic plasma jet

Abstract

Plasma assisted supersonic jet deposition (PA-SJD) is a technique which combines a inductively coupled plasma (ICP) with a supersonic jet for the fabrication of thin films having a desired morphology. A reactive argon-oxygen plasma is employed to dissociate an organic precursor (titanium tetra-isopropoxide for TiO2 thin films) in a first vacuum chamber which is connected through a nozzle to a lower pressure chamber. The pressure difference produces a supersonic jet, seeded with nanoparticles. Along the jet the nucleation and aggregation of nanoparticles can be controlled to obtain nanostructured depositions. We report here the results of an analysis performed with a quadrupole mass spectrometer (QMS) which was used to sample neutrals and ions from the jet at different positions along the centerline of the supersonic expansion.