Fraunhofer IISB offers prototyping services for electron devices. Such prototyping builds on proven processes and designs, amending them with customer-specific specifications and additions. The challenge is to efficiently combine existing expertise and proven process/device modules with “on the fly” R&D results and novel findings. In this paper, we present a first solution approach for a smart platform for rapid prototyping in order to improve time-to-market in low-volume device fabrication. This solution covers research of a digital twin for optimized management of wafer containers, development of intelligent algorithms for process and equipment control as well as a novel approach for “smart experiments” to achieve an accelerated transfer of process development to ISO-certified production.
CITATION STYLE
Schellenberger, M., Anger, S., Pfeffer, M., Häublein, V., Roeder, G., & Bauer, A. (2020). Smart Platform for Rapid Prototyping: A First Solution Approach to Improve Time-to-Market and Process Control in Low-Volume Device Fabrication. In Lecture Notes in Electrical Engineering (Vol. 670 LNEE, pp. 129–135). Springer. https://doi.org/10.1007/978-3-030-48602-0_12
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