ULTRA-LOW NOISE, HIGH-SENSITIVITY MEMS ACCELEROMETER FOR SATELLITE GRAVIMETRY

Abstract

Satellite gravimetry requires sub-ng acceleration measurement at frequencies below 100mHz. To bring the performance of a MEMS accelerometer closer to this level, one must decrease noise sources and maximize sensitivity (to decrease input-referred electronic noise). Electrostatic pull-in based operation has great potential for high sensitivity since it relies on time transduction. Devices were fabricated with maximized proof mass (170mg over a 13x14mm2 footprint) and tuned damping coefficient (trade-off between noise and sensitivity – pull-in operation requires low Q-factors). Novel stopper designs and caps limit both in-plane and out-of-plane displacements. Devices tested using pull-in voltage-based transduction showed sensitivity of 218 V/g.