Calibration of Electron Microscopes: How to do this, how often, pit-falls and problems

Abstract

SEM Instrument calibration is something most people don't always realize they need to do. Images look about right so the magnification seems close enough. Today, measurements are being done in specialized scanned beam metrology instruments everyday, so correct magnification calibration is very important. Calibration is probably more acknowledged from the point of the transmission electron microscope than for the scanning microscope. But, it still needs to be done. Today, people can buy SEM's that cost around $100,000 (refurbished ones somewhat less) to $2.5M with one instrument model from one manufacturer costing about $8M. Believe it or not, often the instrument buyer thinks that as soon as they get the instrument into their facility (since it is new and they paid a lot of money for it) that it is perfect and everything is correct.