Design and fabrication of a micro zinc/air battery

Abstract

Micro-batteries are one of the key components that restrict the application of autonomous Microsystems. However little efforts were made to solve the problem. We have proposed a new planar zinc/air micro-battery, suitable for autonomous microsystem applications. The micro-battery has a layered structure of zinc electrode/alkaline electrolyte/air cathode. A 3D zinc electrode with a high density of posts was designed to obtain a high porosity, hence to offer a best performance. A model of the micro-battery is developed and the device performances were simulated and discussed. A four-mask process was developed to fabricate the prototype micro-batteries. The preliminary testing results showed the micro-batteries is able to deliver a maximum power up to 5 mW, and with an average power of 100 νW at a steady period for up to 2hrs. Fabrication process is still under optimization for further improvement. © 2006 IOP Publishing Ltd.