Structural and electrical properties of swift heavy ion beam irradiated Co/Si interface

Abstract

Synthesis of swift heavy ion induced metal suicide is a new advancement in materials science research. We have investigated the mixing at Co/Si interface by swift heavy ion beam induced irradiation in the electronic stopping power regime. Irradiations were undertaken at room temperature using 120 MeV Au ions at the Co/Si interface for investigation of ion beam mixing at various doses: 8 × 1012, 5 × 1013 and 1 × 1014 cm-2. Formation of different phases of cobalt suicide is identified by the grazing incidence X-ray diffraction (GIXRD) technique, which shows enhancement of intermixing and suicide formation as a result of irradiation. I-V characteristics at Co/Si interface were undertaken to understand the irradiation effect on conduction mechanism at the interface. © Indian Academy of Sciences.