Abstract
A novel approach to the preparation of thin films by using RF diode sputtering was developed. In one deposition run, thin films of doped ZnO:(Al, Ga) were obtained with different structural, optical and electrical properties. ZnO:Al films of low resistivities in order of 10-3 cm and high optical transmittances about 93% have appeared the most suitable for photovoltaic applications. © 2010 FEI STU.
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Flickyngerová, S., Tvarožek, V., & Gašpierik, P. (2010). Zinc oxide -- a unique material for advanced photovoltaic solar cells. Journal of Electrical Engineering, 61(5), 291–295. https://doi.org/10.2478/v10187-010-0043-2
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