Design of plasma generator driven by high-frequency high-voltage power supply

Abstract

In this research, a high-frequency high-voltage power supply designed for plasma generator is presented. The power supply mainly consists of a series resonant converter with a high-frequency high-voltage boost transformer. Due to the indispensable high-voltage inheritance in the operation of plasma generator, the analysis of transformer need considering not only winding resistance, leakage inductance, magnetizing inductance, and core-loss resistance, but also parasitic capacitance resulted from the insulation wrappings on the high-voltage side. This research exhibits a simple approach to measuring equivalent circuit parameters of the high-frequency, high-voltage transformer with stray capacitance being introduced into the conventional modeling. The proposed modeling scheme provides not only a precise measurement procedure but also effective design information for series-load resonant converter. The plasma discharging plate is designed as part of the electric circuit in the series load-resonant converter and the circuit model of the plasma discharging plate is also conducted as well. Thus, the overall model of the high-voltage plasma generator is built and the designing procedures for appropriate selections of the corresponding resonant-circuit parameters can be established. Finally, a high-voltage plasma generator with 220V, 60Hz, and 1kW input, along with a 22 kHz and over 8kV output, is realized and implemented.