Tactile sensor using micro-cantilever with BiFeO3 piezoelectric film

Abstract

We have developed the tactile sensor using micro-cantilevers embedded in the elastomer which can measure both the normal and shear forces by piezoresistance. In this work, a piezoelectric tactile sensor using micro-cantilevers embedded in the elastomer has been proposed and fabricated for realizing lower power consumption than the conventional sensor using piezoresistor. The BiFeO3 thin film (thickness: 400 nm) deposited by rf sputtering at substrate temperature of 520°C and gas pressure of 0.6 Pa has a good piezoelectric property because output voltage of 300 mV is obtained for strain induced by vibration of the cantilever. Therefore, it is demonstrated that the BiFeO3 can be used to detect the micro-cantilever deflection by external force applied on the tactile sensor.