Sub-angstrom Spatial Resolution in Secondary-electron Imaging Achieved with an Aberration Corrected Scanning Electron Microscope

H Inada; D Su; M Konno; K Nakamura; RF Egerton; J Wall; Y Zhu

Journal ArticleOPEN ACCESS

Sub-angstrom Spatial Resolution in Secondary-electron Imaging Achieved with an Aberration Corrected Scanning Electron Microscope

Inada H
Su D
Konno M
et al.

Microscopy and Microanalysis (2010) 16(S2) 610-611

DOI: 10.1017/s1431927610059349

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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

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APA

Inada, H., Su, D., Konno, M., Nakamura, K., Egerton, R., Wall, J., & Zhu, Y. (2010). Sub-angstrom Spatial Resolution in Secondary-electron Imaging Achieved with an Aberration Corrected Scanning Electron Microscope. Microscopy and Microanalysis, 16(S2), 610–611. https://doi.org/10.1017/s1431927610059349

Sub-angstrom Spatial Resolution in Secondary-electron Imaging Achieved with an Aberration Corrected Scanning Electron Microscope

Abstract

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