A MEMS AlN transducer array with flexible interconnections for use as a cochlear implant

Abstract

A completely implantable artificial organ of Corti (CIAO) was fabricated using batch MEMS processing techniques. A silicon backbone supports five piezoelectric cantilevers, each of which is designed to have an in vivo resonance corresponding to its tonotopic location in the Guinea pig ST (20-40 kHz). An attachable polymer ribbon cable extends 4cm from the probe to an electrode bay, where electrical connections to each cantilever are accessed. The actuation responses of the fabricated devices were measured using laser vibrometry confirming the fluid-loaded resonance conforming to the straight section of the first turn of the Guinea pig cochlea. First generation devices have been fabricated and the actuated resonances were measured to range from 80.3-134.2kHz in air and 24.3-41.0 kHz in water.