Design rules for a nano-opto-mechanical actuator based on suspended slotwaveguides

Abstract

In this paper, physical modeling including optical and Casimir forces is adopted in order to analyze a nano-opto-mechanical actuator based on silicon-on-insulator suspended slot waveguides. Numerical simulations based on the finite element method and systematic design rules are presented. Moreover, parametric investigations on slot waveguide sizes and optical properties are presented, and their influence on the actuator's features are discussed.