SnO2-Based CMOS-Integrated Gas Sensor Optimized by Mono-, Bi-, and Trimetallic Nanoparticles

Abstract

Chemical sensors, relying on electrical conductance changes in a gas-sensitive material due to the surrounding gas, have the (dis-)advantage of reacting with multiple target gases and humidity. In this work, we report CMOS-integrated SnO2 thin film-based gas sensors, which are functionalized with mono-, bi-, and trimetallic nanoparticles (NPs) to optimize the sensor performance. The spray pyrolysis technology was used to deposit the metal oxide sensing layer on top of a CMOS-fabricated micro-hotplate (µhp), and magnetron sputtering inert-gas condensation was employed to functionalize the sensing layer with metallic NPs, Ag-, Pd-, and Ru-NPs, and all combinations thereof were used as catalysts to improve the sensor response to carbon monoxide and to suppress the cross-sensitivity toward humidity. The focus of this work is the detection of toxic carbon monoxide and a specific hydrocarbon mixture (HCmix) in a concentration range of 5–50 ppm at different temperatures and humidity levels. The use of CMOS chips ensures low-power, integrated sensors, ready to apply in cell phones, watches, etc., for air quality-monitoring purposes.