High-Entropy Alloy Films

Abstract

High-entropy alloy films have the same excellent properties as high-entropy alloys and can better realize the practical applications of high-entropy alloys. This paper takes the high-entropy alloy films as the object of discussion. The preparation process, microstructure, hardness, wear resistance and corrosion resistance of high-entropy alloy films are mainly discussed and the influence of nitridation, sputtering power, substrate temperature, substrate bias and other factors on the phase structure of alloy films is analyzed. High-entropy alloy films can be prepared using magnetron sputtering, laser cladding, pulsed laser deposition, detonation spraying, electrochemical deposition and other processes. High-entropy alloy films tend to form a solid solution and amorphous state, and their hardness is far higher than that of traditional films. Among them, the hardness of high-entropy alloy nitride films can reach the standard of superhard films. Wear resistance is usually proportional to hardness. Due to the corrosion-resistant elements and amorphous structure, some high-entropy alloy films have better corrosion resistance than stainless steel. High-entropy alloy films have shown profound development prospects in the fields of wear-resistant coatings for tools, corrosion protection, diffusion barrier and photothermal conversion coatings.