Optical Waveguides in SIMOX Structures

Abstract

Planar optical waveguides have been formed in SIMOX structures and their propagation characteristics have been determined. All the samples were found to support both TE and TM modes at both 1.15 μm and 1.523μm with a lowest propagation loss of 8 dB/cm. This loss was measured at a wavelength of 1.15 μm for the TE0mode of a planar waveguide with a 2.0-μm-thick Si guiding layer. © 1991 IEEE