Special Issue Ceramics Integration. Integration of Ferroelectric Ca2Bi4Ti5O18 Thin Films on Pt-Passivated Si via Spin-Coating Technique.

  • KATO K
  • SUZUKI K
  • FU D
  • et al.
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KATO, K., SUZUKI, K., FU, D., NISHIZAWA, K., & MIKI, T. (2002). Special Issue Ceramics Integration. Integration of Ferroelectric Ca2Bi4Ti5O18 Thin Films on Pt-Passivated Si via Spin-Coating Technique. Journal of the Ceramic Society of Japan, 110(1281), 403–407. https://doi.org/10.2109/jcersj.110.403

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