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Metallic coatings for MEMS structures

IOP Conference Series: Materials Science and Engineering (2018) 387(1)
DOI: 10.1088/1757-899X/387/1/012040
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Abstract

This paper presents the results of mechanical stresses measurement in thin metal films in the composition of MEMS structures. The main requirements for metal films for MEMS are presented, recommendations for choosing methods of film deposition are given.

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Korlyakov, A. V., Mikhailova, O. N., & Serkov, A. V. (2018). Metallic coatings for MEMS structures. In IOP Conference Series: Materials Science and Engineering (Vol. 387). Institute of Physics Publishing. https://doi.org/10.1088/1757-899X/387/1/012040

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