Design and analysis of capacitive pressure sensor with L shaped electrode for enhanced sensitivity

Abstract

Accurate pressure measurement is essential across a wide range of fields, including engineering, healthcare, and transportation. This paper presents the design and development of a novel capacitive pressure sensor featuring an extended measurement range and a large pressure application area compared to the parallel plate capacitor configuration. The main innovation lies in the shape and structure of the L shaped electrode which enhances the operational range in terms of the displacement, increased surface area. The sensor exhibits enhanced sensitivity and operational efficiency, making it well suited for diverse applications. The sensor is modeled and simulated in COMSOL MULTIPHYSICS environment to validate its functionality under varying pressure. The electric field distribution, change in capacitance and change in displacement are measurable from the simulation. The sensor is capable of bidirectional making it suitable for the measurement of differential pressure. The proposed sensor simulation results achieve an 11% improvement in both sensitivity and range over conventional parallel plate designs. Furthermore, its ability to operate as a bidirectional device highlights its adaptability and potential for integration into advanced sensing systems.