Vacuum ion emission from solid electrolytes: An alternative source for focused ion beams

Abstract

A bright ion source based on the solid electrolyte (AgI) 0.5(AgPO3)0.5 has been developed. The solid electrolyte source provides stable currents of Ag+ in the microampere regime that make it suitable for focused ion beam applications. Similar conditions are expected for different solid electrolyte materials and their corresponding ions. This opens a broad field of applications in structuring and modifying devices on a nanometer scale using focused ion beams. © 2006 American Institute of Physics.