A novel offset cancellation based on parasitic-insensitive sensing circuit for the out-of-plane single-gimbaled decoupled CMOS-MEMS gyroscope

Abstract

This paper presents a novel parasitic-insensitive switched-capacitor (PISC) sensing circuit design in order to obtain high sensitivity and ultra linearity and reduce the parasitic effect for the out-of-plane single-gimbaled decoupled CMOS-MEMS gyroscope (SGDG). According to the simulation results, the proposed PISC circuit has better sensitivity and high linearity in a wide dynamic range. Experimental results also show a better performance. In addition, the PISC circuit can use signal processing to cancel the offset and noise. Thus, this circuit is very suitable for gyroscope measurement. © 2013 by the authors; licensee MDPI, Basel, Switzerland.