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The structure design of piezoresistive pressure sensor based on MEMS

Journal of Physics: Conference Series (2020) 1650(2)
DOI: 10.1088/1742-6596/1650/2/022082
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Abstract

This paper mainly designed the basic structure of the piezoresistive pressure sensor based on MEMS, analysed and optimized the structure size of the sensor, verified the rationality of the structure by finite element modelling. Through theoretical and optimization analysis, the main structural parameters of MEMS are determined.

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Zhou, Y., Han, W., Shi, S., Zhang, Q., & Guo, T. (2020). The structure design of piezoresistive pressure sensor based on MEMS. In Journal of Physics: Conference Series (Vol. 1650). IOP Publishing Ltd. https://doi.org/10.1088/1742-6596/1650/2/022082

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