Piezoeletric micropump for drug delivery system fabricated using two optical masks

Abstract

In this study, a Piezoelectric Actuated Valveless Micropump (PAVM) has been designed and successfully fabricated using MEMS fabrication processes. A PZT: Pb (ZrTi) Ox (lead titanate zirconate) disc is used to actuate a silicon membrane by applying an alternating electrical field across the actuator. The resultant reciprocating movement of the pump membrane is then converted into pumping effect. Preliminary analysis of the fluidic characteristics of this micropump was performed using CoventorWare Simulator with MEMs-FSI (Fluid Structure Interaction) module to understand the working behaviour of the pump system. The pump is fabricated in a simple micromachining process with two optical masks using a double side polished silicon wafer. The tests carried out on the micropump have produced promising results to be used in the drug delivery system. © (2009) Trans Tech Publications.