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Wide-band optical fibre system for investigation of mems and nems deflection

Metrology and Measurement Systems (2014) 21(3) 381-388
DOI: 10.2478/mms-2014-0032
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Abstract

In this work the construction of experimental setup for MEMS/NEMS deflection measurements is presented. The system is based on intensity fibre optic detector for linear displacement sensing. Furthermore the electronic devices: current source for driving the light source and photodetector with wide-band preamplifier are presented.

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APA

Orłowska, K., Świątkowski, M., Kunicki, P., Słupski, P., Sankowska, A., & Gotszalk, T. (2014). Wide-band optical fibre system for investigation of mems and nems deflection. Metrology and Measurement Systems, 21(3), 381–388. https://doi.org/10.2478/mms-2014-0032

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