Femtosecond laser processing system with target tracking feature

Abstract

A femtosecond laser processing system with a target tracking feature was developed. The block matching method based on a sum-of-squared-difference metric was used to measure the transverse movement of a target. Surface position was detected with an astigmatic sensor to measure the axial movement. The maximum tracking speeds of the target in the transverse and axial directions were 150 and 100 μm/s, respectively. A square traveling sample and an inclined sample were processed.