Planar-type MEMS tactile sensor integrating micro-macro detection function of fingertip to evaluate surface touch sensation

Abstract

In this study, a tactile sensor integrating micro- and macro-scale tactile detection components was developed to reproduce the micro/macro touch sensations of the human fingertip. The micro-scale tactile detection component comprises a 500 μm diameter contactor that mimics the shape and size of the fingerprint ridge, and detects the micro shape of surfaces and local friction with high spatial resolution. The macro-scale tactile detection component detects the overall contact force and slipperiness via a wide-area sensor that mimics the skin of the fingertip. Three fabric samples with different weave structures were analyzed using the fabricated device. The fine surface pattern of the fabrics and slip friction were detected, and the differences according to the weave structure clearly extracted. Additionally, the contact force dependency of the tactile information, which is an important factor with regard to the touch sensation of a fabric, was successfully obtained using the two detection components.