Design and Simulation of Platinum Micro Heater for VOC sensing Applications

Abstract

Micro electro-mechanical system (MEMS) technology is flourishing the development of various sensors. Conventionally MEMS devices have been extensively used for upward performance of gas sensors over a period of time. This paper presents the designing of meander shaped microheater with the commercial FEM tool is used for simulation. Microheater is designed for application of VOC sensing applications. As the volatile organic compounds are to be vaporized a microheater is used. The geometric aspects of the microheater state the temperature effects on the VOC’s.Thus the dimensions were optimized for uniform distribution of heat across the surface. It was observed from the analytical analysis and FEM simulation that at 2um thickness, Microheater was able to distribute the heat uniformity across the surface