Precise analysis of sputtering plasmas diagnostics by laser-induced fluorescence

Abstract

This review article reports analyses of magnetron sputtering plasmas based on precise diagnostics by laser-induced fluorescence imaging spectroscopy. We show two-dimensional distribution of a radical density, anomalous ionization of metal atoms in high-pressure magnetron sputtering discharges, effects of oxidation reactions in a reactive sputtering process for depositing a YBaCuO superconducting film, and the thermalization process of Fe atoms ejected from the target.